TETRAMETHYLSILANE, 99+%

Product Code: SIT7555.0
CAS No: 75-76-3
SDS Sheets: EU | US
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75-76-3
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100 g
$220.00
2.5 kg
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10 kg
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Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    200-899-1
  • Synonyms

    TMS; 4MS
  • HMIS

    1-4-0-X
  • Molecular Formula

    C4H12Si
  • Molecular Weight (g/mol)

    88.22
  • Purity (%)

    99%
  • TSCA

    Yes
  • Delta H Vaporization (kJ/mol)

    6.4 kcal/mole
  • Autoignition Temp (˚C)

    450
  • Boiling Point (˚C/mmHg)

    26.6-26.7
  • Density (g/mL)

    0.641
  • Flash Point (˚C)

    -27 °C
  • Melting Point (˚C)

    -99°
  • Refractive Index @ 20˚C

    1.3588
  • Viscosity at 25 ˚C (cSt)

    0.4

Additional Properties

  • Hydrolytic Sensitivity

    1: no significant reaction with aqueous systems

    • Application

    Intermediate for ?-SiC:H thin films by PECVD.1

    Reference

    1. Kim, D. et al. Thin Solid Films 1996, 283, 109.

    Safety

  • Hazard Info

    ihl rat, LC50: >5,000 ppm/4H
  • Packaging Under

    Nitrogen

    • Tetramethylsilane; 4MS; TMS

  • NMR grade
  • Viscosity: 0.4 cSt
  • ?Hcomb: 3,851 kJ/mol
  • ?Hform: -232 kJ/mol
  • ?Hvap: 26.8 kJ/mol
  • ?Hfus: 6.7 kJ/mol
  • Photoionization threshold: 8.1 eV
  • Ce: 1.838 x 10-3
  • Vapor pressure, 20 °C: 589 mm
  • Critical temperature: 185 °C
  • Critical pressure: 33 atm
  • Heat capacity: 195.2 Jmol-1K-1
  • Dielectric constant: 1.92
  • Intermediate for ?-SiC:H thin films by PECVD