1,2,3,4,5,6 HEXAMETHYLCYCLOTRISILAZANE, tech

Product Code: SIH6103.0
CAS No: 2587-46-4
SDS Sheets: EU | US
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2587-46-4
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Pack Size
Quantity
Price
 
25 g
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Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • HMIS

    2-2-1-X
  • Molecular Formula

    C6H21N3Si3
  • Molecular Weight (g/mol)

    219.51
  • Purity (%)

    tech
  • TSCA

    No
  • Boiling Point (˚C/mmHg)

    56/5
  • Density (g/mL)

    0.929
  • Refractive Index @ 20˚C

    1.4580

Additional Properties

  • Hydrolytic Sensitivity

    7: reacts slowly with moisture/water

    • Application

    Pyrolytic deposition in ammonia yields silicon nitride.1

    Reference

    1. Arkles, B. J. Electrochem. Soc. 1986, 133, 233.

    Safety

  • Packaging Under

    Nitrogen