1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE

Product Code: SIH6102.0
CAS No: 1009-93-4
SDS Sheets: EU | US
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1009-93-4
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2 kg
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16 kg
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180 kg
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Prices listed are EXW price (Morrisville, PA US) in USD. Prices vary depending on currency and Incoterms.

Product data and descriptions listed are typical values, not intended to be used as specification.

  • Einecs Number

    213-773-6
  • HMIS

    2-2-1-X
  • Molecular Formula

    C6H21N3Si3
  • Molecular Weight (g/mol)

    219.51
  • Purity (%)

    97%
  • TSCA

    Yes
  • Boiling Point (˚C/mmHg)

    186-188
  • Density (g/mL)

    0.922
  • Flash Point (˚C)

    61 °C
  • Melting Point (˚C)

    -10°
  • Refractive Index @ 20˚C

    1.4448
  • Viscosity at 25 ˚C (cSt)

    '1.7

Additional Properties

  • Hydrolytic Sensitivity

    7: reacts slowly with moisture/water

    • Application

    Modifies positive resists for O2 plasma resistance.1
    Polymerizes to polydimethylsilazane oligomer in presence of Ru/H2.2
    Silylation reagent for diols.3

    Reference

    1. Babich, E. et al. Microelectron. Eng. 1990, 11, 503.
    2. Blum, Y. et al. U.S. Patent 4,216,383, 1986; U.S. Patent 4,788,309, 1988.
    3. Birkofer, L. et al. J. Organomet. Chem. 1980, 187, 21.

    Safety

  • Hazard Info

    oral rat, LD50: 500mg/kg
  • Packaging Under

    Nitrogen

    • Bridging Silicon-Based Blocking Agent

    Used as a protecting group for reactive hydrogens in alcohols, amines, thiols, and carboxylic acids. Organosilanes are hydrogen-like, can be introduced in high yield, and can be removed under selective conditions. They are stable over a wide range of reaction conditions and can be removed in the presence of other functional groups, including other protecting groups. The tolerance of silylated alcohols to chemical transformations summary is presented in Table 1 of the Silicon-Based Blocking Agents brochure.

    Alkyl Silane - Conventional Surface Bonding

    Aliphatic, fluorinated aliphatic or substituted aromatic hydrocarbon substituents are the hydrophobic entities which enable silanes to induce surface hydrophobicity. The organic substitution of the silane must be non-polar. The hydrophobic effect of the organic substitution can be related to the free energy of transfer of hydrocarbon molecules from an aqueous phase to a homogeneous hydrocarbon phase. A successful hydrophobic coating must eliminate or mitigate hydrogen bonding and shield polar surfaces from interaction with water by creating a non-polar interphase. Although silane and silicone derived coatings are in general the most hydrophobic, they maintain a high degree of permeability to water vapor. This allows coatings to breathe and reduce deterioration at the coating interface associated with entrapped water. Since ions are not transported through non-polar silane and silicone coatings, they offer protection to composite structures ranging from pigmented coatings to rebar reinforced concrete. A selection guide for hydrophobic silanes can be found on pages 22-31 of the Hydrophobicity, Hydrophilicity and Silane Surface Modification brochure.

    Hexamethylcyclotrisilazane; Hexamethylcyclotrisilazane; 2,2,4,4,6,6-Hexamethylcyclotrisilazane

  • Viscosity, 20 °C: 1.7 cSt
  • ΔHform: 553 kJ/mol
  • Dielectric constant: 1000Hz: 2.57
  • Dipole moment: 0.92 debye
  • Polymerizes to polydimethylsilazane oligomer in presence of Ru/H2
  • Modifies positive resists for O2 plasma resistance
  • Silylates diols with loss of ammonia
  • Similar in reactivity to HMDS, SIH6110.0
  • Summary of selective deprotection conditions is provided in Table 7 through Table 20 of the Silicon-Based Blocking Agents brochure